Wet Process
| The starting point of all microtechnologies and microelectronic circuits is the wet chemical processing of substrates from the most widely different areas. STANGL wet process systems are subdivided into widely different groups, which are structured according to the demands of the customer and the particular requirements. |  | |
| Semi-automated wet process benches Semi-automated wet process benches installed in clean rooms still form the basis of many microtechnologies. As a result of their standardised basic design, STANGL wet process systems offer a host of advantages:
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Fully-automated wet process systems, which are becoming increasingly important with the increase in the constantly rising integration density of semiconductors with structure widths in the sub-µm range, form the basis of highly-mechanised series production.The use of fully-automated STANGL wet process systems produces a multitude of advantages:
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Quartz and parts cleaning systems In semiconductor technology, the diffusion, CVD or oxidation furnace process constitutes an essential process step in semiconductor manufacture.The use of STANGL quartz tube and parts cleaning systems, which are available in both vertical and horizontal constructions, produces a multitude of advantages for the user:
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